Automated defect spatial signature analysis for semiconductor manufacturing process
US 5982920 A
Abstract
An apparatus and method for performing automated defect spatial signature alysis on a data set representing defect coordinates and wafer processing information includes categorizing data from the data set into a plurality of high level categories, classifying the categorized data contained in each high level category into user-labeled signature events, and correlating the categorized, classified signature events to a present or incipient anomalous process condition.
https://www.google.com/patents/US5982920
Can't wait to see ours.
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