Just reading through some of Chris Macks material on optics, lithpgraphy and Moores Law. He is an amazing man, a great resource.

http://lithoguru.com/scientist/papers_favorites.html

It appears that the semiconductor industry and Moore’s
Law are in the midst of a perfect storm. Semiconductors as
a percentage of electronic devices are probably near or at
saturation, so that semiconductor growth is now limited by
overall electronics growth. A decade of lower industry revenue
growth makes funding chipmaking research and development
at the level required by the historic Moore’s Law pace unlikely.
The end of chip voltage scaling means that smaller transistors
are no longer better transistors—the only reason for shrinking
them is to make them cheaper. And the near-term evolution
of manufacturing technology, especially lithography, does not
look good for keeping manufacturing costs low as device dimensions
shrink. Innovations in semiconductor manufacturing
will surely continue, but the traditional scaling of feature size
is reaching its limits. The industry, and the world, has enjoyed
50 remarkable years of Moore’s Law. There are unlikely to be
many more years left.