Sorry about the formatting as the system does this when I use my ipad or iPhone. Here's a little gem from a little known site called Wikipedia.
Semiconductor
manufacturing
processes
10 µm – 1971
3 µm – 1975
1.5 µm – 1982
1 µm – 1985
800 nm – 1989
600 nm – 1994
350 nm – 1995
250 nm – 1997
180 nm – 1999
130 nm – 2002
90 nm – 2004
65 nm – 2006
45 nm – 2008
32 nm – 2010
22 nm – 2012
14 nm – 2014
10 nm – 2016
7 nm – 2018
5 nm – 2020
Now reset the scale to the paradigm shift at 100nm Poet based integrated chip and onward we go
Great history there by the way. The first chip looked like something out of Frankenstein.
http://en.wikipedia.org/wiki/International_Technology_Roadmap_for_Semiconductors